Maluf, Nadim
An introduction to microelectromechanical systems engineering
/ Nadim Maluf
. - Boston : Artech House, cop. 2000
. - XIX, 265 p. : il
. - (Artech House MEMS library )
ISBN 0-89006-581-0.
Sistemas microeletromecânicos Engenharia mecânica
CDU 621